Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641941 | Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation | Tsuneaki Ohashi | 2003-11-04 |
| 6617059 | Method of forming silicon carbide film on aluminum nitride, film structure and silicon carbide film | Hiroshi Furukubo, Hiromichi Kobayashi | 2003-09-09 |
| 6562183 | Anti-corrosive parts for etching apparatus | Sadanori Shimura, Tsuneaki Ohashi | 2003-05-13 |