Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617059 | Method of forming silicon carbide film on aluminum nitride, film structure and silicon carbide film | Hirotake Yamada, Hiromichi Kobayashi | 2003-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617059 | Method of forming silicon carbide film on aluminum nitride, film structure and silicon carbide film | Hirotake Yamada, Hiromichi Kobayashi | 2003-09-09 |