Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607836 | Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors | Yuji Katsuda, Jun Yoshikawa, Masaaki Masuda | 2003-08-19 |