Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607967 | Process for forming planarized isolation trench in integrated circuit structure on semiconductor substrate | Dawn M. Lee, Ronald J. Nagahara | 2003-08-19 |
| 6586326 | Metal planarization system | Samuel V. Dunton, Ronald J. Nagahara | 2003-07-01 |
| 6555475 | Arrangement and method for polishing a surface of a semiconductor wafer | Ron Nagahara | 2003-04-29 |
| 6503828 | Process for selective polishing of metal-filled trenches of integrated circuit structures | Ronald J. Nagahara, James J. Xie, Akihisa Ueno | 2003-01-07 |