Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503828 | Process for selective polishing of metal-filled trenches of integrated circuit structures | Ronald J. Nagahara, James J. Xie, Jayanthi Pallinti | 2003-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503828 | Process for selective polishing of metal-filled trenches of integrated circuit structures | Ronald J. Nagahara, James J. Xie, Jayanthi Pallinti | 2003-01-07 |