Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653791 | Method and apparatus for producing uniform process rates | Andrew D. Bailey, III, Alan M. Schoepp | 2003-11-25 |
| 6592710 | Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator | Neil Benjamin | 2003-07-15 |
| 6562190 | System, apparatus, and method for processing wafer using single frequency RF power in plasma processing chamber | Andreas Fischer | 2003-05-13 |
| 6518705 | Method and apparatus for producing uniform process rates | Mark Wilcoxson, Andrew D. Bailey, III, Michael G. R. Smith, Alan M. Schoepp | 2003-02-11 |