Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623561 | Rotary atomizer for particulate paints | Kurt Vetter, Rolf Schneider, Robert F. Heldt | 2003-09-23 |
| 6578423 | Acoustic detection of dechucking and apparatus therefor | — | 2003-06-17 |
| 6562190 | System, apparatus, and method for processing wafer using single frequency RF power in plasma processing chamber | Andras Kuthi | 2003-05-13 |
| 6551803 | Method for purification of amino acid containing solutions by electrodialysis | Christoph Martin, Jurgen Muller | 2003-04-22 |