Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653852 | Wafer integrated plasma probe assembly array | — | 2003-11-25 |
| 6592710 | Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator | Andras Kuthi | 2003-07-15 |
| 6563076 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Scott Baldwin, Seyed Jafar Jafarian-Tehrani | 2003-05-13 |
| 6509542 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Scott Baldwin, Seyed Jafar Jafarian-Tehrani | 2003-01-21 |