Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563076 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Neil Benjamin, Scott Baldwin | 2003-05-13 |
| 6509542 | Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor | Neil Benjamin, Scott Baldwin | 2003-01-21 |