Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669783 | High temperature electrostatic chuck | Greg Sexton, Mark Kennard | 2003-12-30 |
| 6653791 | Method and apparatus for producing uniform process rates | Andrew D. Bailey, III, Andras Kuthi | 2003-11-25 |
| 6567258 | High temperature electrostatic chuck | Greg Sexton, Mark Kennard | 2003-05-20 |
| 6518705 | Method and apparatus for producing uniform process rates | Mark Wilcoxson, Andrew D. Bailey, III, Andras Kuthi, Michael G. R. Smith | 2003-02-11 |