Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669783 | High temperature electrostatic chuck | Alan M. Schoepp, Mark Kennard | 2003-12-30 |
| 6646857 | Semiconductor wafer lifting device and methods for implementing the same | Thomas W. Anderson | 2003-11-11 |
| 6567258 | High temperature electrostatic chuck | Mark Kennard, Alan M. Schoepp | 2003-05-20 |