Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669783 | High temperature electrostatic chuck | Greg Sexton, Alan M. Schoepp | 2003-12-30 |
| 6567258 | High temperature electrostatic chuck | Greg Sexton, Alan M. Schoepp | 2003-05-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669783 | High temperature electrostatic chuck | Greg Sexton, Alan M. Schoepp | 2003-12-30 |
| 6567258 | High temperature electrostatic chuck | Greg Sexton, Alan M. Schoepp | 2003-05-20 |