Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653267 | Aqueous dispersion for chemical mechanical polishing used for polishing of copper | Hiroyuki Yano, Gaku Minamihaba, Masayuki Motonari, Masayuki Hattori | 2003-11-25 |
| 6582761 | METHOD OF PRODUCTION OF COMPOSITED PARTICLE, COMPOSITED PARTICLE PRODUCED BY THIS METHOD AND AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING CONTAINING THIS COMPOSITED PARTICLE, AND METHOD OF PRODUCTION OF AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING | Kazuo Nishimoto, Masayuki Hattori | 2003-06-24 |
| 6579153 | Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process | Kazuhito Uchikura, Masayuki Motonari, Masayuki Hattori | 2003-06-17 |
| 6559056 | Aqueous dispersion for chemical mechanical polishing | Masayuki Hattori, Hitoshi Kishimoto | 2003-05-06 |
| 6527818 | Aqueous dispersion for chemical mechanical polishing | Masayuki Hattori, Kiyonobu Kubota, Kazuo Nishimoto | 2003-03-04 |