Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653267 | Aqueous dispersion for chemical mechanical polishing used for polishing of copper | Hiroyuki Yano, Gaku Minamihaba, Masayuki Hattori, Nobuo Kawahashi | 2003-11-25 |
| 6579153 | Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process | Kazuhito Uchikura, Masayuki Hattori, Nobuo Kawahashi | 2003-06-17 |
| 6565767 | Polymer particles and polishing material containing them | Masayuki Hattori, Akira Iio | 2003-05-20 |