Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632751 | Method and apparatus for liquid-treating and drying a substrate | Marc Meuris | 2003-10-14 |
| 6592676 | Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate | Lee M. Loewenstein, Guy Vereecke | 2003-07-15 |
| 6568408 | Method and apparatus for removing a liquid from a surface of a rotating substrate | Mark Meuris, Marc Heyns | 2003-05-27 |
| 6551409 | Method for removing organic contaminants from a semiconductor surface | Stefan DeGendt, Dirk Maarten Knotter, Marc Heyns, Marc Meuris | 2003-04-22 |
| 6530385 | Apparatus and method for wet cleaning or etching a flat substrate | Marc Meuris, Marc Heyns | 2003-03-11 |