Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6568408 | Method and apparatus for removing a liquid from a surface of a rotating substrate | Paul Mertens, Mark Meuris | 2003-05-27 |
| 6551409 | Method for removing organic contaminants from a semiconductor surface | Stefan DeGendt, Dirk Maarten Knotter, Marc Meuris, Paul Mertens | 2003-04-22 |
| 6530385 | Apparatus and method for wet cleaning or etching a flat substrate | Marc Meuris, Paul Mertens | 2003-03-11 |