Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632751 | Method and apparatus for liquid-treating and drying a substrate | Paul Mertens | 2003-10-14 |
| 6576151 | Etching of silicon nitride by anhydrous halogen gas | Guy Vereecke | 2003-06-10 |
| 6551409 | Method for removing organic contaminants from a semiconductor surface | Stefan DeGendt, Dirk Maarten Knotter, Marc Heyns, Paul Mertens | 2003-04-22 |
| 6530385 | Apparatus and method for wet cleaning or etching a flat substrate | Paul Mertens, Marc Heyns | 2003-03-11 |