Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592676 | Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate | Paul Mertens, Lee M. Loewenstein | 2003-07-15 |
| 6576151 | Etching of silicon nitride by anhydrous halogen gas | Marc Meuris | 2003-06-10 |