Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667223 | High aspect ratio high density plasma (HDP) oxide gapfill method in a lines and space pattern | — | 2003-12-23 |
| 6621112 | DRAM with vertical transistor and trench capacitor memory cells and methods of fabrication | Venkatachalam C. Jaiprakash, Norbert Arnold | 2003-09-16 |
| 6531377 | Method for high aspect ratio gap fill using sequential HDP-CVD | Andreas Knorr | 2003-03-11 |
| 6509226 | Process for protecting array top oxide | Venkatachalam C. Jaiprakash, Jack A. Mandelman, Ramachandra Divakaruni, Rajeev Malik | 2003-01-21 |