Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639488 | MEMS RF switch with low actuation voltage | Hariklia Deligianni, Robert A. Groves, Jennifer Lund, Panayotis Andricacos, John M. Cotte +3 more | 2003-10-28 |
| 6577011 | Chip interconnect wiring structure with low dielectric constant insulator and methods for fabricating the same | Leena Paivikki Buchwalter, Alessandro C. Callegari, Stephan A. Cohen, Teresita O. Graham, John P. Hummel +3 more | 2003-06-10 |