Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664186 | Method of film deposition, and fabrication of structures | Deborah A. Neumayer | 2003-12-16 |
| 6665033 | Method for forming alignment layer by ion beam surface modification | Praveen Chaudhari, Fuad E. Doany, James P. Doyle, Eileen A. Galligan, James H. Glownia +6 more | 2003-12-16 |
| 6583847 | Self alignment of substrates by magnetic alignment | Praveen Chaudhari, James P. Doyle, Eileen A. Galligan, James A. Lacey, Shui-Chih Lien +3 more | 2003-06-24 |
| 6577011 | Chip interconnect wiring structure with low dielectric constant insulator and methods for fabricating the same | Leena Paivikki Buchwalter, Stephan A. Cohen, Teresita O. Graham, John P. Hummel, Christopher V. Jahnes +3 more | 2003-06-10 |
| 6573197 | Thermally stable poly-Si/high dielectric constant material interfaces | Evgeni Gousev, Michael A. Gribelyuk, Paul C. Jamison, Dianne L. Lacey | 2003-06-03 |
| 6511876 | High mobility FETS using A1203 as a gate oxide | Douglas A. Buchanan, Michael A. Gribelyuk, Paul C. Jamison, Deborah A. Neumayer | 2003-01-28 |