Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai +3 more | 2003-08-19 |
| 6586161 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2003-07-01 |
| 6539959 | Cleaning apparatus for plate-like part and method thereof | Noriyuki Ohroku, Yuichirou Tanaka, Yoichi Takahara, Susumu Aiuchi, Hitoshi Oka +3 more | 2003-04-01 |