Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2003-11-11 |
| 6509568 | Electrostatic deflector for electron beam exposure apparatus | Yoshihisa Ooae, Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Ryoji Kato | 2003-01-21 |