Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509568 | Electrostatic deflector for electron beam exposure apparatus | Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Tomohiko Abe, Ryoji Kato | 2003-01-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509568 | Electrostatic deflector for electron beam exposure apparatus | Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Tomohiko Abe, Ryoji Kato | 2003-01-21 |