Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2003-11-11 |
SA
Soichiro Arai
Overall (2003): #117,453 of 273,478Top 45%
1
Patents 2003