Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646275 | Charged particle beam exposure system and method | Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2003-11-11 |
YO
Yoshihisa Oae
Overall (2003): #86,123 of 273,478Top 35%
1
Patents 2003