Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656659 | Resist composition suitable for short wavelength exposure and resist pattern forming method | Koji Nozaki | 2003-12-02 |
| 6613834 | Low dielectric constant film material, film and semiconductor device using such material | Yoshihiro Nakata, Shun-ichi Fukuyama, Katsumi Suzuki, Tamotsu Owada, Iwao Sugiura | 2003-09-02 |
| 6605414 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu, Takahisa Namiki +4 more | 2003-08-12 |
| 6582878 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Keiji Watanabe, Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu | 2003-06-24 |
| 6565419 | Method of removing particles from stage and cleaning plate | Naoki Nishio, Kazushi Ishida, Yukio Takigawa | 2003-05-20 |
| 6545363 | Contactor having conductive particles in a hole as a contact electrode | Shigeyuki Maruyama, Susumu Kida, Naoyuki Watanabe, Takafumi Hashitani, Ichiro Midorikawa | 2003-04-08 |
| 6541077 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Miwa Kozawa, Keiji Watanabe | 2003-04-01 |
| 6506534 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Junichi Kon, Miwa Kozawa | 2003-01-14 |