Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670309 | Method and apparatus for preparing fluorine-based solvent | Hiroshi Chiba, Eishin Yamakawa, Takeshi Tokairin | 2003-12-30 |
| 6605414 | Method for manufacturing magnetoresistance head | Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu, Ei Yano, Takahisa Namiki +4 more | 2003-08-12 |
| 6582878 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Ei Yano, Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu | 2003-06-24 |
| 6551749 | Developer and method for forming resist pattern and photomask produced by use thereof | Toshikatsu Minagawa, Eiichi Hoshino | 2003-04-22 |
| 6541077 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Miwa Kozawa, Ei Yano | 2003-04-01 |