Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667238 | Polishing method and apparatus | Norio Kimura, Katsuhiko Tokushige, Masao Asami, Naoto Miyashita, Masako Kodera +3 more | 2003-12-23 |
| 6602396 | Electrolytic machining method and apparatus | Yuzo Mori, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata | 2003-08-05 |
| 6543080 | Apparatus and method for cleaning semiconductor substrate | Hiroshi Tomita, Soichi Nadahara, Kenya Ito, Yuki Inoue | 2003-04-08 |