Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602396 | Electrolytic machining method and apparatus | Yuzo Mori, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Itsuki Kobata | 2003-08-05 |
| 6558478 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Sachiko Kihara | 2003-05-06 |
| 6554205 | Gas polishing method, gas polishing nozzle and polishing apparatus | Syuhei Shinozuka, Kaori Miyoshi | 2003-04-29 |
| 6519842 | Method for mounting semiconductor device | Hiroshi Nagasawa | 2003-02-18 |
| 6517642 | Method and apparatus of producing thin film of metal or metal compound | Kuniaki Horie | 2003-02-11 |