Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517642 | Method and apparatus of producing thin film of metal or metal compound | Akira Fukunaga | 2003-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517642 | Method and apparatus of producing thin film of metal or metal compound | Akira Fukunaga | 2003-02-11 |