Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643882 | Substrate cleaning apparatus | Hiroshi Sotozaki, Koji Atoh, Tatsuo Inoue | 2003-11-11 |
| 6543080 | Apparatus and method for cleaning semiconductor substrate | Hiroshi Tomita, Soichi Nadahara, Mitsuhiko Shirakashi, Kenya Ito | 2003-04-08 |