Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667238 | Polishing method and apparatus | Norio Kimura, Mitsuhiko Shirakashi, Katsuhiko Tokushige, Masao Asami, Naoto Miyashita +3 more | 2003-12-23 |
| 6645876 | Etching for manufacture of semiconductor devices | Mami Saito, Hiroshi Tomita, Kunihiro Miyazaki | 2003-11-11 |
| 6639317 | Semiconductor device in trench | Hiroshi Tomita | 2003-10-28 |
| 6543080 | Apparatus and method for cleaning semiconductor substrate | Hiroshi Tomita, Mitsuhiko Shirakashi, Kenya Ito, Yuki Inoue | 2003-04-08 |