Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583069 | Method of silicon oxide and silicon glass films deposition | Vladislav Vassiliev | 2003-06-24 |
| 6540841 | Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate | Sudipto Ranendra Roy, Subhash Gupta, Simon Chooi, Xu Yi, Yakub Aliyu +2 more | 2003-04-01 |
| 6528886 | Intermetal dielectric layer for integrated circuits | Huang Liu, Juan Boon Tan, Edwin Goh, Alan Cuthbertson, Arthur Ang +3 more | 2003-03-04 |