Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664546 | In-situ probe for optimizing electron beam inspection and metrology based on surface potential | Jan Lauber, Jun Pei, Jorge Pablo Fernandez | 2003-12-16 |
| 6627884 | Simultaneous flooding and inspection for charge control in an electron beam inspection machine | David J. Walker, Jun Pei, Neil Richardson | 2003-09-30 |
| 6597006 | Dual beam symmetric height systems and methods | Jun Pei | 2003-07-22 |
| 6586736 | Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample | — | 2003-07-01 |