Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664546 | In-situ probe for optimizing electron beam inspection and metrology based on surface potential | Mark A. McCord, Jan Lauber, Jorge Pablo Fernandez | 2003-12-16 |
| 6627884 | Simultaneous flooding and inspection for charge control in an electron beam inspection machine | Mark A. McCord, David J. Walker, Neil Richardson | 2003-09-30 |
| 6597006 | Dual beam symmetric height systems and methods | Mark A. McCord | 2003-07-22 |