Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664546 | In-situ probe for optimizing electron beam inspection and metrology based on surface potential | Mark A. McCord, Jan Lauber, Jun Pei | 2003-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664546 | In-situ probe for optimizing electron beam inspection and metrology based on surface potential | Mark A. McCord, Jan Lauber, Jun Pei | 2003-12-16 |