Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649923 | Positional deviation detecting method and device manufacturing method using the same | — | 2003-11-18 |
| 6636303 | Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus | Hideki Ina, Koichi Sentoku | 2003-10-21 |
| 6633102 | Insulator for armature of dynamo-electric machine | Kenji Nagai, Hiroaki Kondo, Hisanobu Higashi | 2003-10-14 |
| 6605392 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Keiko Chiba | 2003-08-12 |
| 6559924 | Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory | Hideki Ina, Koichi Sentoku | 2003-05-06 |