Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645707 | Device manufacturing method | Mitsuaki Amemiya, Shunichi Uzawa, Yutaka Watanabe | 2003-11-11 |
| 6627468 | Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing device | — | 2003-09-30 |
| 6605392 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Takahiro Matsumoto | 2003-08-12 |