Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665371 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Akira Miyake, Nobuaki Ogushi | 2003-12-16 |
| 6645707 | Device manufacturing method | Mitsuaki Amemiya, Shunichi Uzawa, Keiko Chiba | 2003-11-11 |
| 6647086 | X-ray exposure apparatus | Mitsuaki Amemiya | 2003-11-11 |
| 6603833 | X-ray exposure apparatus | Shigeru Terashima | 2003-08-05 |