Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665371 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Yutaka Watanabe, Nobuaki Ogushi | 2003-12-16 |
| 6504896 | X-ray illumination optical system and x-ray reduction exposure apparatus | Masami Tsukamoto | 2003-01-07 |