Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636303 | Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus | Hideki Ina, Takahiro Matsumoto | 2003-10-21 |
| 6559924 | Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory | Hideki Ina, Takahiro Matsumoto | 2003-05-06 |
| 6529625 | Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by using separate reference member having alignment marks | Hideki Ina | 2003-03-04 |