Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639677 | Position measuring method and position measuring system using the same | Hiroshi Morohoshi | 2003-10-28 |
| 6636303 | Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus | Koichi Sentoku, Takahiro Matsumoto | 2003-10-21 |
| 6636311 | Alignment method and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2003-10-21 |
| 6563573 | Method of evaluating imaging performance | Hiroshi Morohoshi | 2003-05-13 |
| 6559924 | Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory | Koichi Sentoku, Takahiro Matsumoto | 2003-05-06 |
| 6552798 | Position detecting method and system for use in exposure apparatus | Takehiko Suzuki, Atsushi Kitaoka | 2003-04-22 |
| 6529625 | Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by using separate reference member having alignment marks | Koichi Sentoku | 2003-03-04 |
| 6521889 | Dust particle inspection apparatus, and device manufacturing method using the same | Kenji Itoga | 2003-02-18 |