Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639677 | Position measuring method and position measuring system using the same | Hideki Ina | 2003-10-28 |
| 6633390 | Focus measurement in projection exposure apparatus | Yoshihiro Shiode, Izumi Tsukamoto, Yoshio Kawanobe | 2003-10-14 |
| 6563573 | Method of evaluating imaging performance | Hideki Ina | 2003-05-13 |