Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639713 | Silicon micromachined optical device | Chen-Wei Chiu, Aramais Avakian, Tom Tsao, Fukang Jiang, Jeff Dickson | 2003-10-28 |
| 6622872 | Micromachined membrane particle filter using parylene reinforcement | Xing YANG | 2003-09-23 |
| 6612535 | MEMS valve | Xing YANG, Charles I. Grosjean | 2003-09-02 |
| 6598750 | Micromachined membrane particle filter using parylene reinforcement | Xing YANG | 2003-07-29 |
| 6536213 | Micromachined parylene membrane valve and pump | Xing YANG, Charles I. Grosjean, Xuan-Qi Wang | 2003-03-25 |
| 6534295 | Cell lysis device | Sang LEE | 2003-03-18 |
| 6526823 | Microelectromechanical system sensor assembly | Qiao Lin, Shuyun Wu | 2003-03-04 |
| 6520753 | Planar micropump | Charles I. Grosjean | 2003-02-18 |
| 6511859 | IC-compatible parylene MEMS technology and its application in integrated sensors | Fukang Jiang, Zhigang Han, Xuan-Qi Wang | 2003-01-28 |