Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6536213 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Xing YANG, Charles I. Grosjean | 2003-03-25 |
| 6511859 | IC-compatible parylene MEMS technology and its application in integrated sensors | Fukang Jiang, Zhigang Han, Yu-Chong Tai | 2003-01-28 |