Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622872 | Micromachined membrane particle filter using parylene reinforcement | Yu-Chong Tai | 2003-09-23 |
| 6612535 | MEMS valve | Yu-Chong Tai, Charles I. Grosjean | 2003-09-02 |
| 6598750 | Micromachined membrane particle filter using parylene reinforcement | Yu-Chong Tai | 2003-07-29 |
| 6536213 | Micromachined parylene membrane valve and pump | Yu-Chong Tai, Charles I. Grosjean, Xuan-Qi Wang | 2003-03-25 |