Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511859 | IC-compatible parylene MEMS technology and its application in integrated sensors | Fukang Jiang, Xuan-Qi Wang, Yu-Chong Tai | 2003-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511859 | IC-compatible parylene MEMS technology and its application in integrated sensors | Fukang Jiang, Xuan-Qi Wang, Yu-Chong Tai | 2003-01-28 |