Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660126 | Lid assembly for a processing system to facilitate sequential deposition techniques | Anh N. Nguyen, Michael Yang, Ming Xi, Hua Chung, Anzhong Chang +1 more | 2003-12-09 |