Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Gary Fong +2 more | 2003-12-16 |
| 6523494 | Apparatus for depositing low dielectric constant oxide film | Dung-Ching Perng, Thomas E. Deacon | 2003-02-25 |